NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Methods for Optimizing and Extending the Performance of Chemiresistive Gas Microsensors

Published

Author(s)

Kurt D. Benkstein, Alexander (. Vergara Tinoco, Christopher B. Montgomery, Baranidharan Raman, Stephen Semancik

Abstract

This paper briefly describes varied concepts developed and implemented to enhance the performance of gas-phase chemical microsensors. The developments are illustrated for chemiresistive (MEMS) microdevices, and involve efficient, array-based approaches to sensing materials selection and optimization, formulation of custom operating modes, and the use of bioinspired and life-extending methods. These developments, which are essentially modular in nature, can enable required levels of sensitivity and speed while also introducing application-specific selectivity. Examples from diverse application areas are provided to demonstrate performance characteristics and extended operation capabilities.
Proceedings Title
IEEE Sensors 2013
Conference Dates
November 3-6, 2013
Conference Location
Baltimore, MD, US
Pub Type
Conferences

Download Paper

DOI Link

Keywords

array, chemical microsensor, gas phase, oxide, resistance, signal processing, temperature modulation
Analytical chemistry

Citation

Benkstein, K. , Vergara Tinoco, A. , Montgomery, C. , Raman, B. and Semancik, S. (2013), Methods for Optimizing and Extending the Performance of Chemiresistive Gas Microsensors, IEEE Sensors 2013, Baltimore, MD, US, [online], https://doi.org/10.1109/ICSENS.2013.6688194 (Accessed October 27, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created November 2, 2013, Updated October 12, 2021
Was this page helpful?