Benkstein, K.
, Vergara Tinoco, A.
, Montgomery, C.
, Raman, B.
and Semancik, S.
(2013),
Methods for Optimizing and Extending the Performance of Chemiresistive Gas Microsensors, IEEE Sensors 2013, Baltimore, MD, US, [online], https://doi.org/10.1109/ICSENS.2013.6688194
(Accessed October 5, 2024)
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Methods for Optimizing and Extending the Performance of Chemiresistive Gas Microsensors
Published
Author(s)
, , , Baranidharan Raman,
Abstract
This paper briefly describes varied concepts developed and implemented to enhance the performance of gas-phase chemical microsensors. The developments are illustrated for chemiresistive (MEMS) microdevices, and involve efficient, array-based approaches to sensing materials selection and optimization, formulation of custom operating modes, and the use of bioinspired and life-extending methods. These developments, which are essentially modular in nature, can enable required levels of sensitivity and speed while also introducing application-specific selectivity. Examples from diverse application areas are provided to demonstrate performance characteristics and extended operation capabilities.Proceedings Title
IEEE Sensors 2013
Conference Dates
November 3-6, 2013
Conference Location
Baltimore, MD, US
Pub Type
Conferences
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Keywords
array, chemical microsensor, gas phase, oxide, resistance, signal processing, temperature modulation
Citation
Issues
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Created November 2, 2013, Updated October 12, 2021