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Methods for Optimizing and Extending the Performance of Chemiresistive Gas Microsensors

Published

Author(s)

Kurt D. Benkstein, Alexander (. Vergara Tinoco, Christopher B. Montgomery, Baranidharan Raman, Stephen Semancik

Abstract

This paper briefly describes varied concepts developed and implemented to enhance the performance of gas-phase chemical microsensors. The developments are illustrated for chemiresistive (MEMS) microdevices, and involve efficient, array-based approaches to sensing materials selection and optimization, formulation of custom operating modes, and the use of bioinspired and life-extending methods. These developments, which are essentially modular in nature, can enable required levels of sensitivity and speed while also introducing application-specific selectivity. Examples from diverse application areas are provided to demonstrate performance characteristics and extended operation capabilities.
Proceedings Title
IEEE Sensors 2013
Conference Dates
November 3-6, 2013
Conference Location
Baltimore, MD, US

Keywords

array, chemical microsensor, gas phase, oxide, resistance, signal processing, temperature modulation

Citation

Benkstein, K. , Vergara Tinoco, A. , Montgomery, C. , Raman, B. and Semancik, S. (2013), Methods for Optimizing and Extending the Performance of Chemiresistive Gas Microsensors, IEEE Sensors 2013, Baltimore, MD, US, [online], https://doi.org/10.1109/ICSENS.2013.6688194 (Accessed April 14, 2024)
Created November 2, 2013, Updated October 12, 2021