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Analog BIST Functionality for Microhotplate Temperature Sensors
Published
Author(s)
Muhammad Y. Afridi, Christopher B. Montgomery, Elliott cooper-Balis, Stephen Semancik, Kenneth G. Kreider, Jon C. Geist
Abstract
In this paper we describe a novel microhotplate temperature sensor calibration technique suitable for Built-In Self Test. The technique only requires short-term temperature stability from the four-wire polysilicon heater/temperature sensors that are commonly used in microhotplates, and relies on the long term temperature stability of different types of temperature sensors, which may not be suitable for direct calibration.
Afridi, M.
, Montgomery, C.
, cooper-Balis, E.
, Semancik, S.
, Kreider, K.
and Geist, J.
(2009),
Analog BIST Functionality for Microhotplate Temperature Sensors, IEEE Electron Device Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902033
(Accessed October 1, 2025)