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Fabrication and Characterization of a Dual-mode SPR/SERS Sensor Based on Plasmonic Nanodome Arrays



Charles J. Choi, Stephen Semancik


This work describes a label-free, optical sensor system fabricated on a flexible plastic film with dual detection modalities: surface-enhanced Raman scattering (SERS) for specific chemical identification and localized surface plasmon resonance (LSPR) for capture-affinity biosensing. The sensor surface is comprised of a close-packed array of 383 nm diameter dome structures with interdome spacing of 14 nm, fabricated by a nanoreplica molding process and unpatterned blanket deposition of SiO2 and Ag thin films. The nanoreplica molding process presented in this work allows for simple, high-throughput fabrication of uniform nanoscale structures (nanodome arrays) over large surface areas without the requirement for high resolution lithography, additional processes such as etching and liftoff, or defect-free deposition of spherical microparticle monolayer templates. Such fabrication characteristics are important for realizing high performance, low-cost measurement technology.
Conference Dates
November 3-6, 2013
Conference Location
Baltimore, MD
Conference Title
IEEE Sensors 2013


Localized surface plasmon resonance, surface-enhanced Raman scattering, Optical sensor, Replica molding


Choi, C. and Semancik, S. (2013), Fabrication and Characterization of a Dual-mode SPR/SERS Sensor Based on Plasmonic Nanodome Arrays, IEEE Sensors 2013, Baltimore, MD, [online], (Accessed February 24, 2024)
Created November 3, 2013, Updated November 10, 2018