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Displaying 26 - 50 of 99

Robust Auto-Alignment Technique for Orientation-Dependent Etching of Nanostructures

May 29, 2012
Author(s)
Craig D. McGray, Richard J. Kasica, Ndubuisi G. Orji, Ronald G. Dixson, Michael W. Cresswell, Richard A. Allen, Jon C. Geist
A robust technique is presented for auto-aligning nanostructures to slow-etching crystallographic planes in materials with diamond cubic structure. Lithographic mask patterns are modified from the intended dimensions of the nanostructures to compensate for

The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)

March 21, 2012
Author(s)
Janet M. Cassard, Jon C. Geist, Michael Gaitan, David G. Seiler
The MEMS 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with NIST measurements, thereby validating their use of the documentary

Traceable Calibration of a Critical Dimension Atomic Force Microscope

March 9, 2012
Author(s)
Ronald G. Dixson, Ndubuisi G. Orji, Craig D. McGray, John E. Bonevich, Jon C. Geist
The National Institute of Standards and Technology (NIST) has a multifaceted program in atomic force microscope (AFM) dimensional metrology. One component of this program, and the focus of this paper, is the use of critical dimension atomic force

DNA Molecules Descending a Nanofluidic Staircase by Entropophoresis

January 26, 2012
Author(s)
Samuel M. Stavis, Jon C. Geist, Michael Gaitan, Laurie E. Locascio, Elizabeth A. Strychalski
A complex entropy gradient for confined DNA molecules was engineered for the first time. Following the second law of thermodynamics, this enabled the directed self-transport and self-concentration of DNA molecules. This new nanofluidic method is termed

MICROHOTPLATE TEMPERATURE SENSOR CALIBRATION AND BIST

January 3, 2012
Author(s)
Muhammad Y. Afridi, Christopher B. Montgomery, Stephen Semancik, Kenneth G. Kreider, Jon C. Geist
In this paper we describe a novel long-term microhotplate temperature sensor calibration technique suitable for Built-In Self Test (BIST). The microhotplate thermal resistance (thermal efficiency) and the thermal voltage from an integrated platinum-rhodium

DNA ENTROPOPHORESIS: A BALANCE OF ENTROPY AND DIFFUSION IN COMPLEX NANOCONFINEMENT

October 3, 2011
Author(s)
Samuel Stavis, Jon Geist, Michael Gaitan, Laurie E. Locascio, Elizabeth Strychalski
Entropophoresis - motion caused by an entropy gradient - is a novel nanofluidic method to direct the self-transport of biopolymers that established a new paradigm of nanofluidic functionality with broad relevance to lab-on-a-chip technol-ogy. Here, the

Rectangular Scale-Similar Etch Pits in Monocrystalline Diamond

September 15, 2011
Author(s)
Craig D. McGray, Richard A. Allen, Marc J. Cangemi, Jon C. Geist
Etching of monocrystalline diamond in oxygen and water vapor at 1100° C through small pores in a silicon nitride film produced smooth-walled rectangular cavities. The cavities were imaged by electron microscope and measured by interferometric microscopy

User's Guide for SRM 2494 and 2495: The MEMS 5-in-1, 2011 Edition

September 6, 2011
Author(s)
Janet M. Cassard, Jon C. Geist, Theodore V. Vorburger, David T. Read, David G. Seiler
The Microelectromechanical Systems (MEMS) 5-in-1 is a standard reference device sold as a NIST Standard Reference Material (SRM) that contains MEMS test structures on a test chip. The two SRM chips (2494 and 2495) provide for both dimensional and material

Traceable Calibration of a Critical Dimension Atomic Force Microscope

June 6, 2011
Author(s)
Ronald G. Dixson, Ndubuisi G. Orji, Craig D. McGray, Jon C. Geist
The National Institute of Standards and Technology (NIST) has a multifaceted program in atomic force microscope (AFM) dimensional metrology. One component of this effort is a custom in-house metrology AFM, called the calibrated AFM (C-AFM). The NIST C-AFM

Progress on CD-AFM tip width calibration standards

May 10, 2011
Author(s)
Ronald G. Dixson, Boon Ping Ng, Craig D. McGray, Ndubuisi G. Orji, Jon C. Geist
The National Institute of Standards and Technology (NIST) is developing a new generation of standards for calibration of CD-AFM tip width. These standards, known as single crystal critical dimension reference materials (SCCDRM) have features with near

MEMS Microhotplate Temperature Sensor BIST: Importance and Applications

November 3, 2010
Author(s)
Muhammad Y. Afridi, Jon C. Geist
This paper describe the importance of temperature sensor built-in self test (BIST) for microhotplate based sensors. It shows possible ways to implement BIST functionality for microhotplate temperature sensor, including Resistance Temperature Detectors (RTD

MEMS Young's Modulus and Step Height Measurements with Round Robin Results

September 30, 2010
Author(s)
Janet M. Cassard, Richard A. Allen, Craig D. McGray, Jon C. Geist
This paper presents the results of a microelectromechanical systems (MEMS) Young s modulus and step height round robin experiment, completed in April 2009, which compares Young s modulus and step height measurement results at a number of laboratories. The

Separation and Metrology of Nanoparticles by Nanofluidic Size Exclusion

August 11, 2010
Author(s)
Samuel M. Stavis, Jon C. Geist, Michael Gaitan
A nanofluidic approach to the separation and metrology of nanoparticles is demonstrated. Advantages of this approach include nanometer-scale resolution, nanometer-scale to submicrometer-scale range, mitigation of hydrodynamic and diffusional limitations to

Accurate optical analysis of single molecule entrapment in nanoscale vesicles

January 1, 2010
Author(s)
Joseph E. Reiner, Andreas Jahn, Samuel M. Stavis, Michael J. Culbertson, Wyatt N. Vreeland, Daniel L. Burden, Jon C. Geist, Michael Gaitan
We present a non-destructive method to characterize low analyte concentrations in nanometer scale lipid vesicle formulations. Our method is based on the application of fluorescence fluctuation analysis (FFA) and multi-angle laser light scattering (MALLS)