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PUBLICATIONS

MEMS Microhotplate Temperature Sensor BIST: Importance and Applications

Published

Author(s)

Muhammad Y. Afridi, Jon C. Geist

Abstract

This paper describe the importance of temperature sensor built-in self test (BIST) for microhotplate based sensors. It shows possible ways to implement BIST functionality for microhotplate temperature sensor, including Resistance Temperature Detectors (RTD), microhotplate thermal efficiency, and Thermocouples. A calibration technique is discussed and conclusions are given.
Proceedings Title
IEEE Sensors conference
Conference Dates
November 1-4, 2010
Conference Location
Waikoloa, HI
Conference Title
IEEE Sensors 2010 Conference
The 9th Annual IEEE Conference on Sensors
Pub Type
Conferences

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Local Download

Keywords

Microhotplate, MEMS, BIST, Thermal efficiency
Metrology

Citation

Afridi, M. and Geist, J. (2010), MEMS Microhotplate Temperature Sensor BIST: Importance and Applications, IEEE Sensors conference, Waikoloa, HI, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906589 (Accessed October 13, 2025)

Issues

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Created November 3, 2010, Updated February 19, 2017
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