MEMS Microhotplate Temperature Sensor BIST: Importance and Applications
Muhammad Y. Afridi, Jon C. Geist
This paper describe the importance of temperature sensor built-in self test (BIST) for microhotplate based sensors. It shows possible ways to implement BIST functionality for microhotplate temperature sensor, including Resistance Temperature Detectors (RTD), microhotplate thermal efficiency, and Thermocouples. A calibration technique is discussed and conclusions are given.
IEEE Sensors conference
November 1-4, 2010
IEEE Sensors 2010 Conference
The 9th Annual IEEE Conference on Sensors
and Geist, J.
MEMS Microhotplate Temperature Sensor BIST: Importance and Applications, IEEE Sensors conference, Waikoloa, HI, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906589
(Accessed December 7, 2023)