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MEMS Microhotplate Temperature Sensor BIST: Importance and Applications

Published

Author(s)

Muhammad Y. Afridi, Jon C. Geist

Abstract

This paper describe the importance of temperature sensor built-in self test (BIST) for microhotplate based sensors. It shows possible ways to implement BIST functionality for microhotplate temperature sensor, including Resistance Temperature Detectors (RTD), microhotplate thermal efficiency, and Thermocouples. A calibration technique is discussed and conclusions are given.
Proceedings Title
IEEE Sensors conference
Conference Dates
November 1-4, 2010
Conference Location
Waikoloa, HI
Conference Title
IEEE Sensors 2010 Conference
The 9th Annual IEEE Conference on Sensors

Keywords

Microhotplate, MEMS, BIST, Thermal efficiency

Citation

Afridi, M. and Geist, J. (2010), MEMS Microhotplate Temperature Sensor BIST: Importance and Applications, IEEE Sensors conference, Waikoloa, HI, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906589 (Accessed June 20, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created November 3, 2010, Updated February 19, 2017