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MEMS Microhotplate Temperature Sensor BIST: Importance and Applications



Muhammad Y. Afridi, Jon C. Geist


This paper describe the importance of temperature sensor built-in self test (BIST) for microhotplate based sensors. It shows possible ways to implement BIST functionality for microhotplate temperature sensor, including Resistance Temperature Detectors (RTD), microhotplate thermal efficiency, and Thermocouples. A calibration technique is discussed and conclusions are given.
Proceedings Title
IEEE Sensors conference
Conference Dates
November 1-4, 2010
Conference Location
Waikoloa, HI
Conference Title
IEEE Sensors 2010 Conference
The 9th Annual IEEE Conference on Sensors


Microhotplate, MEMS, BIST, Thermal efficiency


Afridi, M. and Geist, J. (2010), MEMS Microhotplate Temperature Sensor BIST: Importance and Applications, IEEE Sensors conference, Waikoloa, HI, [online], (Accessed June 20, 2024)


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Created November 3, 2010, Updated February 19, 2017