Afridi, M.
and Geist, J.
(2010),
MEMS Microhotplate Temperature Sensor BIST: Importance and Applications, IEEE Sensors conference, Waikoloa, HI, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906589
(Accessed January 16, 2025)
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MEMS Microhotplate Temperature Sensor BIST: Importance and Applications
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Abstract
This paper describe the importance of temperature sensor built-in self test (BIST) for microhotplate based sensors. It shows possible ways to implement BIST functionality for microhotplate temperature sensor, including Resistance Temperature Detectors (RTD), microhotplate thermal efficiency, and Thermocouples. A calibration technique is discussed and conclusions are given.Proceedings Title
IEEE Sensors conference
Conference Dates
November 1-4, 2010
Conference Location
Waikoloa, HI
Conference Title
IEEE Sensors 2010 Conference
The 9th Annual IEEE Conference on Sensors
The 9th Annual IEEE Conference on Sensors
Pub Type
Conferences
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Keywords
Microhotplate, MEMS, BIST, Thermal efficiency
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created November 3, 2010, Updated February 19, 2017