@conference{53626, author = {Muhammad Afridi and Jon Geist}, title = {MEMS Microhotplate Temperature Sensor BIST: Importance and Applications}, year = {2010}, month = {2010-11-03}, publisher = {IEEE Sensors conference, Waikoloa, HI}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906589}, language = {en}, }