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Progress on CD-AFM tip width calibration standards

Published

Author(s)

Ronald G. Dixson, Boon Ping Ng, Craig D. McGray, Ndubuisi G. Orji, Jon C. Geist

Abstract

The National Institute of Standards and Technology (NIST) is developing a new generation of standards for calibration of CD-AFM tip width. These standards, known as single crystal critical dimension reference materials (SCCDRM) have features with near-vertical sidewalls. This is accomplished using preferential etching on (110) silicon-on-insulator (SOI) substrates. As such, these structures are particularly useful for CD-AFM tip width calibration. As part of a previous generation of SCCDRMs that was released to the Member Companies of SEMATECH, we were able to deliver structures with linewidths ranging from as low as 50 nm up to 240 nm. These typically had expanded uncertainties (k = 2) of between 1.5 nm and 2 nm. Subsequently, these chips were used as a traceable source of tip width calibration for CD-AFM by SEMATECH and several Member Companies. We are now working on a new generation of SCCDRMs with the goal of reducing linewidth expanded uncertainties, and we are using our new CD-AFM to support this development. The features are patterned using electron beam lithography with equipment available in the new nanofabrication facility within the Center for Nanoscale Science and Technology (CNST) at NIST. Intact features as small as 10 nm have been observed with non-uniformity sufficiently low to support 1 nm expanded uncertainties. We believe it will be possible to fabricate features as small as 5 nm and we are now working to refine the fabrication process and to assess the limits of our approach.
Volume
8378
Conference Dates
April 24-26, 2012
Conference Location
Baltimore, MD
Conference Title
Scanning Microscopies 2012: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences

Keywords

CD-AFM, metrology, CD, linewidth, reference measurement system, standards, calibration, traceability

Citation

Dixson, R. , , B. , McGray, C. , Orji, N. and Geist, J. (2011), Progress on CD-AFM tip width calibration standards, Scanning Microscopies 2012: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences, Baltimore, MD (Accessed February 22, 2024)
Created May 10, 2011, Updated February 19, 2017