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The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)
Published
Author(s)
Janet M. Cassard, Jon C. Geist, Michael Gaitan, David G. Seiler
Abstract
The MEMS 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with NIST measurements, thereby validating their use of the documentary standard test methods. Example NIST reference values are given for an RM 8096 monitor chip used at NIST for stability studies.
Proceedings Title
International Conference on Microelectronic Test Structures (ICMTS)
Cassard, J.
, Geist, J.
, Gaitan, M.
and Seiler, D.
(2012),
The MEMS 5-in-1 Reference Materials (RM 8096 and 8097), International Conference on Microelectronic Test Structures (ICMTS), San Diego, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910317
(Accessed October 10, 2025)