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The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)

Published

Author(s)

Janet M. Cassard, Jon C. Geist, Michael Gaitan, David G. Seiler

Abstract

The MEMS 5-in-1 Reference Material (RM) contains test structures for five standard test methods on one test chip, so companies can compare their in-house measurements taken on the RM with NIST measurements, thereby validating their use of the documentary standard test methods. Example NIST reference values are given for an RM 8096 monitor chip used at NIST for stability studies.
Proceedings Title
International Conference on Microelectronic Test Structures (ICMTS)
Conference Dates
March 19-22, 2012
Conference Location
San Diego, CA

Keywords

ASTM, cantilevers, fixed-fixed beams, interferometry, length measurements, MEMS, residual strain, residual stress, SEMI, RM, step height measurements, strain gradient, stress gradient, test structures, thickness, vibrometry, Young's modulus measurements

Citation

Cassard, J. , Geist, J. , Gaitan, M. and Seiler, D. (2012), The MEMS 5-in-1 Reference Materials (RM 8096 and 8097), International Conference on Microelectronic Test Structures (ICMTS), San Diego, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910317 (Accessed June 2, 2023)
Created March 21, 2012, Updated February 19, 2017