TY  - CONF
AU  - Janet Cassard
AU  - Jon Geist
AU  - Michael Gaitan
AU  - David Seiler
C2  - International Conference on Microelectronic Test Structures (ICMTS), San Diego, CA
DA  - 2012-03-21
LA  - en
PB  - International Conference on Microelectronic Test Structures (ICMTS), San Diego, CA
PY  - 2012
TI  - The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910317
ER  -