@conference{26806,
  author = {Janet Cassard and Jon Geist and Michael Gaitan and David Seiler},
  title = {The MEMS 5-in-1 Reference Materials (RM 8096 and 8097)},
  year = {2012},
  month = {2012-03-21},
  publisher = {International Conference on Microelectronic Test Structures (ICMTS), San Diego, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910317},
  language = {en},
}