Temperature-Programmed Gas-Sensing With Microhotplates: An Opportunity to Enhance Microelectronic Gas Sensor Metrology
Jon C. Geist, Muhammad Y. Afridi
It is only recently that the ITRS (International Technical Roadmap for Semiconductors) has identified functional diversification through heterogeneous integration as a key enabler of future industry growth. This paper describes a powerful temperature programmed gas sensing technique that has the potential to convert low-cost, integrated, microhotplate-based non-selective, metal-oxide gas sensors into stable, sensitive, and highly selective gas sensor systems. The paper also points out the importance of temperature sensor stability to support this technique.
Frontiers of Characterization and Metrology for Nanoelectronics
MEMS, Microhotplate, Gas sensor, Temperature programming, More than Moore, Heterogeneous integration, Functional Diversification.
and Afridi, M.
Temperature-Programmed Gas-Sensing With Microhotplates: An Opportunity to Enhance Microelectronic Gas Sensor Metrology, Frontiers of Characterization and Metrology for Nanoelectronics, Albany, NY, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902948
(Accessed December 11, 2023)