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Temperature-Programmed Gas-Sensing With Microhotplates: An Opportunity to Enhance Microelectronic Gas Sensor Metrology

Published

Author(s)

Jon C. Geist, Muhammad Y. Afridi

Abstract

It is only recently that the ITRS (International Technical Roadmap for Semiconductors) has identified functional diversification through heterogeneous integration as a key enabler of future industry growth. This paper describes a powerful temperature programmed gas sensing technique that has the potential to convert low-cost, integrated, microhotplate-based non-selective, metal-oxide gas sensors into stable, sensitive, and highly selective gas sensor systems. The paper also points out the importance of temperature sensor stability to support this technique.
Proceedings Title
Frontiers of Characterization and Metrology for Nanoelectronics
Conference Dates
May 11-15, 2009
Conference Location
Albany, NY

Keywords

MEMS, Microhotplate, Gas sensor, Temperature programming, More than Moore, Heterogeneous integration, Functional Diversification.

Citation

Geist, J. and Afridi, M. (2009), Temperature-Programmed Gas-Sensing With Microhotplates: An Opportunity to Enhance Microelectronic Gas Sensor Metrology, Frontiers of Characterization and Metrology for Nanoelectronics, Albany, NY, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902948 (Accessed July 17, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created October 5, 2009, Updated February 19, 2017