@conference{60031,
  author = {Jon Geist and Muhammad Afridi},
  title = {Temperature-Programmed Gas-Sensing With Microhotplates: An Opportunity to Enhance Microelectronic Gas Sensor Metrology},
  year = {2009},
  month = {2009-10-05},
  publisher = {Frontiers of Characterization and Metrology for Nanoelectronics, Albany, NY},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902948},
  language = {en},
}