TY - CONF AU - Jon Geist AU - Muhammad Afridi C2 - Frontiers of Characterization and Metrology for Nanoelectronics, Albany, NY DA - 2009-10-05 LA - en PB - Frontiers of Characterization and Metrology for Nanoelectronics, Albany, NY PY - 2009 TI - Temperature-Programmed Gas-Sensing With Microhotplates: An Opportunity to Enhance Microelectronic Gas Sensor Metrology UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902948 ER -