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Search Publications by: Richard E Cavicchi (Fed)

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Displaying 51 - 75 of 85

Chemical Crosstalk Between Heated Gas Microsensor Elements Operating in Close Proximity

June 1, 2001
Author(s)
M C. Wheeler, J E. Tiffany, R M. Walton, Richard E. Cavicchi, Stephen Semancik
Gas microsensor arrays often have closely-spaced elements typically separated by hundreds of microns. For such devices, crosstalk between elements operated within a gaseous environment is a concern because sensing materials held at elevated temperatures

Microhotplate Platforms for Chemical Sensor Research

June 1, 2001
Author(s)
Stephen Semancik, Richard E. Cavicchi, M C. Wheeler, J E. Tiffany, G Poirier, R M. Walton, John S. Suehle, B. Panchapakesan, D. E. DeVoe
This paper describes the development and use of microdevices and microarrays in chemical sensor research. The surface-micromachined microhotplate structure common within the various platforms included here was originally designed for fabricating

Spin-on Nanoparticle Tin Oxide for Microhotplate Gas Sensors

June 1, 2001
Author(s)
Richard E. Cavicchi, R M. Walton, M I. Aquino-Class, J D. Allen, B. Panchapakesan
A colloidal suspension of tin oxide nanoparticles is used to prepare a highly sensitive gas sensing film on a microhotplate. Fabrication consists of spin-coating the solution over an array of micromachined hotplates and annealing. A thermolithographic

Using Chemical Kinetic Effects for Understanding and Developing Chemical Sensors

February 1, 2000
Author(s)
M C. Wheeler, Richard E. Cavicchi, G Poirier, Stephen Semancik
While conductometric gas sensing has been widely studied, the mechanisms are not well understood (particularly for modified oxides). For example, what magnitude of conductance change occurs for a given coverage of adsorbed analyte? We are using specially

Microhotplate Gas Sensor Arrays

November 18, 1999
Author(s)
Richard E. Cavicchi, Stephen Semancik, R M. Walton, B Panchapakesan, Don L. DeVoe, M I. Aquino-Class, J D. Allen, John S. Suehle
In this work, micromachining and planar processing has been used to achieve solid state sensing devices with lower power consumption at lower cost. The small size brings new advantages for chemical selectivity as well: multi-element whose time-varying

Property-Performance Studies of SnO 2 Sensing Films Using Micromachined Arrays

February 22, 1999
Author(s)
R M. Walton, Richard E. Cavicchi, Stephen Semancik
The microstructure and composition of sensing materials profoundly affect the performance of solid state gas sensors. We report property/performance relationships of conductometric gas sensing films deposited on micromachined devices called microhotplates

Solid State Gas Microsensors for Environmental and Industrial Monitoring

January 1, 1999
Author(s)
R M. Walton, Richard E. Cavicchi, Stephen Semancik, B Panchapakesan, Don L. DeVoe, M I. Aquino-Class, J D. Allen, John S. Suehle
We describe solid state gas microsensor array technology for real-time, low-cost environmental and industrial monitoring. The four-element, surface-micromachined arrays are designed in CMOS technology and consist of multiple platforms called microhotplates

Kinetically-Controlled Chemical Sensing Using Micromachined Structures

May 1, 1998
Author(s)
Stephen Semancik, Richard E. Cavicchi
Microdevices produced by machining silicon can offer a variety of control functionality on a miniature scale, 1.2 with general advantages connected to not only reduced size (less invasive), but also lower power requirements, lower cost, and reproducibility

Time-Dependent Conductance of Pd-Dosed SnO2 (110)

January 1, 1998
Author(s)
Richard E. Cavicchi, V Sukharev, Stephen Semancik
Time-dependent phenomena related to the reaction of ultrathin films of Pd deposited on SnO2 (110) surfaces of differing oxygen content have been investigated. Conductance measurements and x-ray photoemission spectroscopy (XPS) were used to characterize