Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

MOCVD of SnO2 on Silicon Microhotplate Arrays for Use in Gas Sensing Applications



F. DiMeo, Stephen Semancik, Richard E. Cavicchi, John S. Suehle, P Chaparala, N. H. Tea
Proceedings Title
Proc., Materials Research Society Symposium
Conference Location
Boston, MA, USA


DiMeo, F. , Semancik, S. , Cavicchi, R. , Suehle, J. , Chaparala, P. and Tea, N. (1996), MOCVD of SnO<sub>2</sub> on Silicon Microhotplate Arrays for Use in Gas Sensing Applications, Proc., Materials Research Society Symposium, Boston, MA, USA (Accessed May 19, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created December 30, 1996, Updated October 12, 2021