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PUBLICATIONS

MOCVD of SnO2 on Silicon Microhotplate Arrays for Use in Gas Sensing Applications

Published

Author(s)

F. DiMeo, Stephen Semancik, Richard E. Cavicchi, John S. Suehle, P Chaparala, N. H. Tea
Proceedings Title
Proc., Materials Research Society Symposium
Volume
415
Conference Location
Boston, MA, USA
Pub Type
Conferences

Citation

DiMeo, F. , Semancik, S. , Cavicchi, R. , Suehle, J. , Chaparala, P. and Tea, N. (1996), MOCVD of SnO<sub>2</sub> on Silicon Microhotplate Arrays for Use in Gas Sensing Applications, Proc., Materials Research Society Symposium, Boston, MA, USA (Accessed December 7, 2024)

Issues

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Created December 30, 1996, Updated October 12, 2021