TY  - CONF
AU  - F. DiMeo
AU  - Stephen Semancik
AU  - Richard Cavicchi
AU  - John Suehle
AU  - P Chaparala
AU  - N. Tea
C2  - Proc., Materials Research Society Symposium, Boston, MA, USA
DA  - 1996-12-31 00:12:00
LA  - en
M1  - 415
PB  - Proc., Materials Research Society Symposium, Boston, MA, USA
PY  - 1996
TI  - MOCVD of SnO<sub>2</sub> on Silicon Microhotplate Arrays for Use in Gas Sensing Applications
ER  -