@conference{765456,
  author = {F. DiMeo and Stephen Semancik and Richard Cavicchi and John Suehle and P Chaparala and N. Tea},
  title = {MOCVD of SnO<sub>2</sub> on Silicon Microhotplate Arrays for Use in Gas Sensing Applications},
  year = {1996},
  number = {415},
  month = {1996-12-31 00:12:00},
  publisher = {Proc., Materials Research Society Symposium, Boston, MA, USA},
  language = {en},
}