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Processing Methods for Selected Area Film Deposition and Preparation on Microsensor Platforms Using Thermal and Potential Control

Published

Author(s)

R M. Walton, Richard E. Cavicchi, C Kendrick, B Panchapakesan, Stephen Semancik

Abstract

In previous work we have used Si-based
Citation
International Conference on Solid State Sensors and Actuators
Volume
1

Keywords

chemical vapor deposition, electrochemical deposition, localized deposition, micromachined Si, microsensors

Citation

Walton, R. , Cavicchi, R. , Kendrick, C. , Panchapakesan, B. and Semancik, S. (1999), Processing Methods for Selected Area Film Deposition and Preparation on Microsensor Platforms Using Thermal and Potential Control, International Conference on Solid State Sensors and Actuators (Accessed May 24, 2024)

Issues

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Created January 1, 1999, Updated February 17, 2017