@article{151681,
  author = {R Walton and Richard Cavicchi and C Kendrick and B Panchapakesan and Stephen Semancik},
  title = {Processing Methods for Selected Area Film Deposition and Preparation on Microsensor Platforms Using Thermal and Potential Control},
  year = {1999},
  number = {1},
  month = {1999-01-01},
  publisher = {International Conference on Solid State Sensors and Actuators},
  language = {en},
}