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Observation of Film Growth Phenomena Using Micromachined Structures

Published

Author(s)

F DiMeo, F, Richard E. Cavicchi, Stephen Semancik, John S. Suehle, N H. Tea, J T. Kelliher
Proceedings Title
Materials Research Society Thin Film Conference on Surface and Morphology
Volume
441
Conference Location
Pittsburgh, PA, USA
Conference Title
Proceedings of the Materials Research Society Thin Film Conference on Surface and Morphology

Citation

DiMeo, F. (1997), Observation of Film Growth Phenomena Using Micromachined Structures, Materials Research Society Thin Film Conference on Surface and Morphology, Pittsburgh, PA, USA (Accessed June 20, 2024)

Issues

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Created November 30, 1997, Updated October 12, 2021