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Observation of Film Growth Phenomena Using Micromachined Structures
Published
Author(s)
F DiMeo, F, Richard E. Cavicchi, Stephen Semancik, John S. Suehle, N H. Tea, J T. Kelliher
Proceedings Title
Materials Research Society Thin Film Conference on Surface and Morphology
Volume
441
Conference Location
Pittsburgh, PA, USA
Conference Title
Proceedings of the Materials Research Society Thin Film Conference on Surface and Morphology
Pub Type
Conferences
Citation
DiMeo, F.
(1997),
Observation of Film Growth Phenomena Using Micromachined Structures, Materials Research Society Thin Film Conference on Surface and Morphology, Pittsburgh, PA, USA
(Accessed June 2, 2023)