TY  - CONF
AU  - F DiMeo
C2  - Materials Research Society Thin Film Conference on Surface and Morphology, Pittsburgh, PA, USA
DA  - 1997-12-01 00:12:00
LA  - en
M1  - 441
PB  - Materials Research Society Thin Film Conference on Surface and Morphology, Pittsburgh, PA, USA
PY  - 1997
TI  - Observation of Film Growth Phenomena Using Micromachined Structures
ER  -