@conference{795001,
  author = {F DiMeo},
  title = {Observation of Film Growth Phenomena Using Micromachined Structures},
  year = {1997},
  number = {441},
  month = {1997-12-01 00:12:00},
  publisher = {Materials Research Society Thin Film Conference on Surface and Morphology, Pittsburgh, PA, USA},
  language = {en},
}