Quantification of a Single Component Gas in Air with a Microhotplate Gas Sensor Using Partial Least Squares Techniques

Published

September 1, 1999

Author(s)

J. Ding, T. J. McAvoy, Richard E. Cavicchi, Stephen Semancik

Abstract

Microhotplate gas sensors can be operated in rapid temperature programmed sensing (TPS) modes due to their small size and mass. The temperature sequences can be optimized to enhance a sensor's sensitivity and to discriminate among similar volatile organic compounds. In this paper, we demonstrate that quantification of a single component gas in air with a microhotplate gas sensor operated in a TPS mode is possible by using partial least squares (PLS) techniques. The calculations of the PLS models are based on gas sensitivity which is the ratio between the dynamic responses to the test gas and to air. We show that the gas concentration can be predicted accurately for different test gases, different temperature sequences, and different metal-doped microhotplate gas sensors. Thus the qualitative and the quantitative analyses of a single component gas in air can be achieved with a single microhotplate gas sensor operated in TPS mode.

Citation

Proceedings of SPIE

Volume

3856

Pub Type

Journals

Keywords

gas sensor, methanol, microhotplate, micromachining, palladium, partial least squares, platinum, temperature programmed sensing, tin oxide

Citation

Ding, J. , McAvoy, T. , Cavicchi, R. and Semancik, S. (1999), Quantification of a Single Component Gas in Air with a Microhotplate Gas Sensor Using Partial Least Squares Techniques, Proceedings of SPIE (Accessed March 27, 2025)