Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Michromachined Array Studies of Tin Oxide Films: Nucleation, Structure and Gas Sensing Characteristics

Published

Author(s)

Stephen Semancik, Richard E. Cavicchi, B Panchapakesan, R M. Walton

Abstract

Growth of tin oxide by micro-chemical vapor deposition has been investigated as a function of type and thickness of seeding layers using four-element arrays of
Citation
Materials Research Society Symposium
Volume
574

Keywords

chemical vapor deposition, gas sensing, micromachined arrays, nucleation, self-lithography, thin films, tin oxide

Citation

Semancik, S. , Cavicchi, R. , Panchapakesan, B. and Walton, R. (1999), Michromachined Array Studies of Tin Oxide Films: Nucleation, Structure and Gas Sensing Characteristics, Materials Research Society Symposium, [online], https://doi.org/10.1557/PROC-574-213 (Accessed April 14, 2024)
Created April 7, 1999, Updated November 10, 2018