TY  - JOUR
AU  - Stephen Semancik
AU  - Richard Cavicchi
AU  - B Panchapakesan
AU  - R Walton
C2  - Materials Research Society Symposium
DA  - 1999-04-07
DO  - https://doi.org/10.1557/PROC-574-213
LA  - en
M1  - 574
PB  - Materials Research Society Symposium
PY  - 1999
TI  - Michromachined Array Studies of Tin Oxide Films: Nucleation, Structure and Gas Sensing Characteristics
ER  -