@article{29806,
  author = {Stephen Semancik and Richard Cavicchi and B Panchapakesan and R Walton},
  title = {Michromachined Array Studies of Tin Oxide Films: Nucleation, Structure and Gas Sensing Characteristics},
  year = {1999},
  number = {574},
  month = {1999-04-07},
  publisher = {Materials Research Society Symposium},
  doi = {https://doi.org/10.1557/PROC-574-213},
  language = {en},
}