DiMeo, F.
(1997),
Silicon Microhotplate Arrays as a Platform for Efficient Gas Sensing Thin Film Research, in Materials Research Society Thin Film Conference on Surface and Morphology, Pittsburgh, PA, USA
(Accessed April 18, 2024)
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Silicon Microhotplate Arrays as a Platform for Efficient Gas Sensing Thin Film Research
Published
Author(s)
F DiMeo, F, , , , N H. Tea, M D. Vaudin, J T. Kelliher
Proceedings Title
in Materials Research Society Thin Film Conference on Surface and Morphology
Conference Location
Pittsburgh, PA, USA
Conference Title
Proc. of the Materials Research Society Thin Film Conference on Surface and Morphology
Pub Type
Conferences
Citation
Created November 30, 1997, Updated October 12, 2021