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Silicon Microhotplate Arrays as a Platform for Efficient Gas Sensing Thin Film Research

Published

Author(s)

F DiMeo, F, Stephen Semancik, Richard E. Cavicchi, John S. Suehle, N H. Tea, M D. Vaudin, J T. Kelliher
Proceedings Title
in Materials Research Society Thin Film Conference on Surface and Morphology
Conference Location
Pittsburgh, PA, USA
Conference Title
Proc. of the Materials Research Society Thin Film Conference on Surface and Morphology

Citation

DiMeo, F. (1997), Silicon Microhotplate Arrays as a Platform for Efficient Gas Sensing Thin Film Research, in Materials Research Society Thin Film Conference on Surface and Morphology, Pittsburgh, PA, USA (Accessed July 14, 2024)

Issues

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Created November 30, 1997, Updated October 12, 2021