TY  - CONF
AU  - F DiMeo
C2  - in Materials Research Society Thin Film Conference on Surface and Morphology, Pittsburgh, PA, USA
DA  - 1997-12-01 00:12:00
LA  - en
PB  - in Materials Research Society Thin Film Conference on Surface and Morphology, Pittsburgh, PA, USA
PY  - 1997
TI  - Silicon Microhotplate Arrays as a Platform for Efficient Gas Sensing Thin Film Research
ER  -