@conference{844996,
  author = {F DiMeo},
  title = {Silicon Microhotplate Arrays as a Platform for Efficient Gas Sensing Thin Film Research},
  year = {1997},
  month = {1997-12-01 00:12:00},
  publisher = {in Materials Research Society Thin Film Conference on Surface and Morphology, Pittsburgh, PA, USA},
  language = {en},
}