July 1, 2012
Author(s)
Thomas M. Wallis, Atif A. Imtiaz, Alexandra Curtin, Pavel Kabos, H. P. Huber, Joseph J. Kopanski, F. Kienberger
Two techniques are described for calibrating a scanning microwave microscope (SMM). The first technique enables spatially-resolved absolute capacitance measurements on the attofarad-to-femtofarad scale. The second technique enables profiling or dopant