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High Accuracy High Speed Gaussian Filter in Surface Metrology

Published

Author(s)

Y B. Yuan, Jun-Feng Song, Theodore V. Vorburger

Abstract

Both (1+x^2)^(-n) and (sin x/x)^n functions are very close to the Gaussian distribution for large value of n. Based on these functions, two new algorithms are developed for designing high accuracy and high speed recursive type Gaussian digital filters. The relationships between the Gaussian filtering and the classical 2RC filtering and between the Gaussian filtering and the moving average filtering are also discussed.
Proceedings Title
International Conference and General Meeting of European Society for Precision Engineering and Nanotechnology
Conference Dates
May 31-June 4, 1999
Conference Location
Bremen, GE
Conference Title
May 31-June 4 (1999)

Keywords

2RC filter, Gaussian filter, mean line, surface roughness

Citation

Yuan, Y. , Song, J. and Vorburger, T. (1999), High Accuracy High Speed Gaussian Filter in Surface Metrology, International Conference and General Meeting of European Society for Precision Engineering and Nanotechnology, Bremen, GE (Accessed July 21, 2024)

Issues

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Created May 31, 1999, Updated February 19, 2017