High Accuracy High Speed Gaussian Filter in Surface Metrology

Published

May 31, 1999

Author(s)

Y B. Yuan, Jun-Feng Song, Theodore V. Vorburger

Abstract

Both (1+x^2)^(-n) and (sin x/x)^n functions are very close to the Gaussian distribution for large value of n. Based on these functions, two new algorithms are developed for designing high accuracy and high speed recursive type Gaussian digital filters. The relationships between the Gaussian filtering and the classical 2RC filtering and between the Gaussian filtering and the moving average filtering are also discussed.

Proceedings Title

International Conference and General Meeting of European Society for Precision Engineering and Nanotechnology

Conference Dates

May 31-June 4, 1999

Conference Location

Bremen, GE

Conference Title

May 31-June 4 (1999)

Pub Type

Conferences

Keywords

2RC filter, Gaussian filter, mean line, surface roughness

Citation

Yuan, Y. , Song, J. and Vorburger, T. (1999), High Accuracy High Speed Gaussian Filter in Surface Metrology, International Conference and General Meeting of European Society for Precision Engineering and Nanotechnology, Bremen, GE (Accessed October 12, 2025)