@conference{189756,
  author = {Y Yuan and Jun-Feng Song and Theodore Vorburger},
  title = {High Accuracy High Speed Gaussian Filter in Surface Metrology},
  year = {1999},
  month = {1999-05-31},
  publisher = {International Conference and General Meeting of European Society for Precision Engineering and Nanotechnology, Bremen, GE},
  language = {en},
}