January 1, 2006
Author(s)
Nadia Machkour-Deshayes, John R. Stoup, John Lu, Johannes A. Soons, Ulf Griesmann, Robert S. Polvani
We are developing an instrument, the Geometry Measuring Machine (GEMM), to measure the profile errors of aspheric and free form optical surfaces, which require measurement uncertainties near 1nm. Using GEMM, an optical profile is reconstructed from a set