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Fabrication of Prototype Imaging Arrays for SCUBA-2



Gene C. Hilton, James A. Beall, W.Bertrand (Randy) Doriese, William Duncan, S. L. Ferreira, Kent D. Irwin, Carl D. Reintsema, Joel Ullom, Leila R. Vale, Yizi Xu, Barry L. Zink, William Parkes, Andrew S. Bunting, Camilla Dunare, Alan Gundlach, T. Stevenson, Anthony Walton, Eric Schulte, Elizabeth Corrales, Joseph P. Sienicki, Dan Bintley, Peter Ade, Rashmi Sudiwala, Adam L. Woodcraft, Mark Halpern, Wayne Holland, Damian Audley, Michael MacIntosh


Prototype imaging sub-arrays for SCUBA-2 (the Sub-millimeter Common-User Bolometer Array) have been fabricated and tested. The pixel count (1280) of these wafer-scale imagers are significantly larger than any other low-temperature detectors produced to date, and represent a major step forward for the low-temperature detector community. These transition-edge-sensor (TES) based imagers utilize several key innovations including in-focal-plane superconducting quantum intereference device (SQUID) multiplexers, micromachined Si block absorbers, and superconducting wafer hybridisation. In this paper, we review the fabrication processes developed for these imagers and present recent optical data from a prototype imaging sub-array.
Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment


bolometer, submillimeter, terahertz, transition-edge sensor


Hilton, G. , Beall, J. , Doriese, W. , Duncan, W. , Ferreira, S. , Irwin, K. , Reintsema, C. , Ullom, J. , Vale, L. , Xu, Y. , Zink, B. , Parkes, W. , Bunting, A. , Dunare, C. , Gundlach, A. , Stevenson, T. , Walton, A. , Schulte, E. , Corrales, E. , Sienicki, J. , Bintley, D. , Ade, P. , Sudiwala, R. , Woodcraft, A. , Halpern, M. , Holland, W. , Audley, D. and MacIntosh, M. (2006), Fabrication of Prototype Imaging Arrays for SCUBA-2, Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment, [online], (Accessed June 18, 2024)


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Created January 3, 2006, Updated October 12, 2021