Green, M.
, Allen, A.
, Li, X.
, Wang, J.
, Ilavsky, J.
, Delabie, A.
, Puurunen, R.
and Brijs, B.
(2006),
The Nucleation of Atomic Layer Deposited HfO2 Films, and Evolution of Their Microstruture, Studied by Grazing Incidence Small Angle X-ray Scattering Using Synchrotron Radiation, Applied Physics Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854304
(Accessed February 18, 2025)