Green, M.
, Allen, A.
, Li, X.
, Wang, J.
, Ilavsky, J.
, Delabie, A.
, Puurunen, R.
and Brijs, B.
(2006),
The Nucleation of Atomic Layer Deposited HfO2 Films, and Evolution of Their Microstruture, Studied by Grazing Incidence Small Angle X-ray Scattering Using Synchrotron Radiation, Applied Physics Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854304
(Accessed April 25, 2024)
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The Nucleation of Atomic Layer Deposited HfO2 Films, and Evolution of Their Microstruture, Studied by Grazing Incidence Small Angle X-ray Scattering Using Synchrotron Radiation
Published
Author(s)
, , , Junling Wang, , A Delabie, R Puurunen, B Brijs
Citation
Applied Physics Letters
Volume
88
Issue
3
Pub Type
Journals
Download Paper
Citation
Created January 16, 2006, Updated February 19, 2017