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Search Publications

NIST Authors in Bold

Displaying 2151 - 2175 of 13215

Measuring the EUV-induced contamination rates of TiO2-capped multilayer optics by anticipated production-environment hydrocarbons

October 1, 2009
Author(s)
Shannon B. Hill, Nadir S. Faradzhev, Charles S. Tarrio, Thomas B. Lucatorto, Robert A. Bartynski, B. V. Yakshinskiy, T. E. Madey
… The primary, publicly reported cause of optic degradation in pre-production extreme-ultraviolet (EUV) lithography … is to estimate the contamination rate of species expected in the tool environment by exposing samples to in-band 13.5 nm light from our synchrotron in the presence of …

Tracking down sources of carbon contamination in EUVL exposure tools

August 3, 2009
Author(s)
Charles S. Tarrio, Robert E. Vest, Thomas B. Lucatorto, R. Caudillo
… Optics in EUVL exposure tools are known to suffer reflectivity … analyzer, but this has not shown carbon-containing species in sufficient concentration to account for the observed … Tracking down sources of carbon contamination in EUVL exposure tools …

EUVL dosimetry at NIST

March 13, 2009
Author(s)
Charles S. Tarrio, Steven E. Grantham, Marc J. Cangemi, Robert E. Vest, Thomas B. Lucatorto, Noreen Harned
… As part of its role in providing radiometric standards in support of industry, NIST has been active in advancing extreme ultraviolet dosimetry on various fronts. …

Ferrite Ceramics at Microwave Frequencies

January 1, 2001
Author(s)
Richard G. Geyer
… Ferrite ceramics are widely used in microwave devices to control transmission path, frequency, … development of these devices, as well as to assist in the manufacture of the ferrite itself. Both dielectric and … Encyclopedia of Materials: Science and Technology …

Combining model-based measurement results of critical dimensions from multiple tools

April 7, 2017
Author(s)
Nien F. Zhang, Bryan M. Barnes, Hui Zhou, Mark Alexander Henn, Richard M. Silver
… these estimates are based upon not only the uncertainties in the experimental data, but also the sensitivity of that … state-of-the-art sub-14 nm-wide lines from semiconductor manufacturing are measured using a combined regression from … Measurement Science and Technology …

Microwave Determination of the Volume of a Pressure Vessel

December 9, 2014
Author(s)
Michael R. Moldover, James W. Schmidt, Keith A. Gillis, James B. Mehl, John D. Wright
… a gas collector for the calibration of gas-flow meters. In addition, we determined the expansion of the vessel with … Measurement Science and Technology …

Modelling of Thermodynamics and Diffusion in Multicomponent Systems

April 1, 2009
Author(s)
Ursula R. Kattner, Carelyn E. Campbell
… data is key to the successful design of materials and manufacturing processes.  Commercial alloys rarely consist of … are rarely available.  The Calphad method, as implemented in a number of software tools, enables the development of … thermodynamic and diffusion properties can be invaluable in the design of new materials.  In addition, the databases …

Thin-Film Resistance Thermometers on Silicon Wafers

March 3, 2009
Author(s)
Kenneth G. Kreider, Dean C. Ripple, William A. Kimes
… of semiconductors is a critical, capital intensive step in achieving high yields and profitability in the manufacturing of electronic chips such as ASICs and DRAMs. … Measurement Science & Technology …

Implementing Speed and Separation Monitoring in Collaborative Robot Workcells

August 1, 2016
Author(s)
Jeremy A. Marvel, Richard J. Norcross
… speed and separation monitoring methodology as presented in the International Organization of Standardization's … minimum protective distance function equation is discussed in detail, with consideration for the input values, … equation, discuss considerations for implementing SSM in human-occupied environments, and provide directions for …

A Simulation-Based BRP Support System for Supply Chain Management

January 1, 1998
Author(s)
Shigeki Umeda, Albert W. Jones
… Modern manufacturing enterprises must collaborate with a large … system, which supports the implementation of BPR in integrated system environment. The scopes of the BPR are … Re-Engineering in Action: The Quest for World Class Excellence … manufacturing, operations management, simulation, supply …

Progress Under The Next Generation Fire Suppression Technology Program (NGP) In FY2000

April 26, 2001
Author(s)
Richard G. Gann
… Department of Defense's Next Generation Fire Suppression Technology Program (NGP) has completed its fourth year of … with a revised goal to develop and demonstrate, by 2005, technology for economically feasible, environmentally … Progress Under The Next Generation Fire Suppression Technology Program (NGP) In FY2000 …

FY2000 Annual Report--Next Generation Fire Suppression Technology Program (NGP)

March 1, 2001
Author(s)
Richard G. Gann
… Department of Defense’s Next Generation Fire Suppression Technology Program (NGP) has completed its fourth year of … with a revised goal to develop and demonstrate, by 2005, technology for economically feasible, environmentally … FY2000 Annual Report--Next Generation Fire Suppression Technology Program (NGP) …

Wireless Network Design for Emerging IIoT Applications: Reference Framework and Use Cases

April 16, 2019
Author(s)
Yongkang Liu, Mohamed T. Hany, Kang B. Lee, Lotfi Benmohamed, Richard Candell
… In this paper we propose a framework that allows a designer … tiered structure using domain knowledge in operational technology (OT) applications, data services, and information technology (IT) infrastructures. Given such structure, the … wireless, manufacturing, IIoT, IoT …

A Sensor-Based Method for Diagnostics of Geometric Performance of Machine Tool Linear Axes

August 4, 2016
Author(s)
Gregory W. Vogl, Matthew Calamari, Sean Ye, Alkan Donmez
… machine tools, and when installed and operating within a manufacturing facility, a machine tool needs to stay in good condition for parts production. All machine tools … accelerometers, and rate gyroscopes to identify changes in linear and angular errors due to axis degradation. A …

Characterization of SiGe Bulk Compositional Standards with Electron Probe Microanalysis

September 1, 2003
Author(s)
Ryna B. Marinenko, J T. Armstrong, Shirley Turner, Eric B. Steel, F A. Stevie
… reference standards, SiGe, Silicon-Germanium Technology … Characterization and Metrology for ULSI Technology, International Conference | | Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization …

The NIST Standards in Trade Program

October 16, 2008
Author(s)
P L. Heydemann
… of technical experts from NIST, or selected by NIST, in key U.S. embassies and missions to provide technical … advice and support to commercial and economic staffs in the identification and resolution of trade issues … partners;2. Works cooperatively with other parts of Technology Services and NIST, the Departments of State and …

Towards the Development of a Documentary Standard for Derived-Point to Derived-Point Distance Performance Evaluation of Spherical Coordinate 3D Imaging Systems

October 30, 2015
Author(s)
Balasubramanian Muralikrishnan, Katharine M. Shilling, Prem K. Rachakonda, Wei Ren, Vincent D. Lee, Daniel S. Sawyer
… Group (DMG) at the National Institute of Standards and Technology (NIST) in support of the development of a documentary standard for … by a reference instrument. A significant challenge in the development of a documentary standard for performance … Journal of Manufacturing Systems …

Precipitation and dissolution of delta and gamma-double-prime during heat treatment of a laser powder-bed fusion produced Ni-based superalloy

June 8, 2018
Author(s)
Eric Lass, Mark R. Stoudt, Maureen E. Williams, Michael B. Katz
… One drawback of the laser powder-bed fusion additive manufacturing (AM) technique is the build-up of residual … 870 °C. The unexpected precipitation of gamma-double-prime in the AM material is attributed to the local solute … Additive manufacturing, Ni-based alloys, Inconel 625 …
Displaying 2151 - 2175 of 13215
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