Bullis, W.
, Perkowitz, S.
and Seiler, D.
(1995),
Semiconductor Measurement Technology: Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed October 14, 2024)
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Semiconductor Measurement Technology: Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry
Published
Author(s)
W M. Bullis, S. Perkowitz,
Citation
Special Publication (NIST SP) -
Volume
400
Issue
98
NIST Pub Series
Pub Type
NIST Pubs
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created November 30, 1995, Updated October 12, 2021