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Semiconductor Measurement Technology: Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry

Published

Author(s)

W M. Bullis, S. Perkowitz, David G. Seiler
Citation
Special Publication (NIST SP) -
Volume
400
Issue
98

Citation

Bullis, W. , Perkowitz, S. and Seiler, D. (1995), Semiconductor Measurement Technology: Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD (Accessed July 14, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created November 30, 1995, Updated October 12, 2021