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Semiconductor Measurement Technology: Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry

Published

Author(s)

W M. Bullis, S. Perkowitz, David G. Seiler
Citation
Special Publication (NIST SP) -
Volume
400
Issue
98

Citation

Bullis, W. , Perkowitz, S. and Seiler, D. (1995), Semiconductor Measurement Technology: Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD (Accessed February 21, 2024)
Created November 30, 1995, Updated October 12, 2021