@misc{776306,
  author = {W Bullis and S. Perkowitz and David Seiler},
  title = {Semiconductor Measurement Technology: Survey of Optical Characterization Methods for Materials, Processing, and Manufacturing in the Semiconductor Industry},
  year = {1995},
  number = {400},
  month = {1995-12-01 00:12:00},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}