August 1, 2004
Author(s)
Bogdan Lita, O Pluchery, R L. Opila, Y J. Chabal, G. Bunea, J P. Holman, E J. Bekos
… chemical species that reside on the wafer surface. In this article, we report the results of our investigations … about 10 nm thick, and that they impede wafer processing. In addition, these "plasma oxides" do not show significant … after removing the wafer from the plasma and storing it in ambient. Moreover, we identify several aqueous solutions, …