Bertness, K.
, Wang, C.
, Salit, M.
, Turk, G.
, Butler, T.
, Paul, A.
and Robins, L.
(2006),
High-accuracy determination of epitaxal AlGaAs composition with inductively coupled plasma optical emission spectroscopy, Journal of Vacuum Science and Technology, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903133
(Accessed October 3, 2024)
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High-accuracy determination of epitaxal AlGaAs composition with inductively coupled plasma optical emission spectroscopy
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, C M. Wang, , , , ,
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Journal of Vacuum Science and Technology
Volume
24
Issue
2
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Journals
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Created April 1, 2006, Updated February 19, 2017