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High-accuracy determination of epitaxal AlGaAs composition with inductively coupled plasma optical emission spectroscopy

Published

Author(s)

Kristine A. Bertness, C M. Wang, Marc L. Salit, Gregory C. Turk, Therese A. Butler, Albert J. Paul, Lawrence H. Robins
Citation
Journal of Vacuum Science and Technology
Volume
24
Issue
2

Citation

Bertness, K. , Wang, C. , Salit, M. , Turk, G. , Butler, T. , Paul, A. and Robins, L. (2006), High-accuracy determination of epitaxal AlGaAs composition with inductively coupled plasma optical emission spectroscopy, Journal of Vacuum Science and Technology, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903133 (Accessed February 25, 2024)
Created April 1, 2006, Updated February 19, 2017