@article{37346,
  author = {Kristine Bertness and C Wang and Marc Salit and Gregory Turk and Therese Butler and Albert Paul and Lawrence Robins},
  title = {High-accuracy determination of epitaxal AlGaAs composition with inductively coupled plasma optical emission spectroscopy},
  year = {2006},
  number = {24},
  month = {2006-04-01},
  publisher = {Journal of Vacuum Science and Technology},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903133},
  language = {en},
}