TY  - JOUR
AU  - Kristine Bertness
AU  - C Wang
AU  - Marc Salit
AU  - Gregory Turk
AU  - Therese Butler
AU  - Albert Paul
AU  - Lawrence Robins
C2  - Journal of Vacuum Science and Technology
DA  - 2006-04-01
LA  - en
M1  - 24
PB  - Journal of Vacuum Science and Technology
PY  - 2006
TI  - High-accuracy determination of epitaxal AlGaAs composition with inductively coupled plasma optical emission spectroscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903133
ER  -