Burnett, J.
(2005),
Optical Materials for Immersion Lithography, Journal of Photopolymer Science and Technology
(Accessed January 10, 2026)
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Optical Materials for Immersion Lithography
Published
Author(s)
John H. Burnett
Citation
Journal of Photopolymer Science and Technology
Volume
18
Pub Type
Journals
Citation
Issues
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Created January 1, 2005, Updated February 17, 2017