Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PSPICE Analysis of a Scanning Capacitance Microscope Sensor

Published

Author(s)

Gyoung H. Buh, Chi Tran, Joseph Kopanski
Citation
Journal of Vacuum Science and Technology B
Volume
22
Issue
1

Citation

Buh, G. , Tran, C. and Kopanski, J. (2004), PSPICE Analysis of a Scanning Capacitance Microscope Sensor, Journal of Vacuum Science and Technology B (Accessed June 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 31, 2004, Updated October 12, 2021