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PSPICE Analysis of a Scanning Capacitance Microscope Sensor
Published
Author(s)
Gyoung H. Buh, Chi Tran, Joseph Kopanski
Citation
Journal of Vacuum Science and Technology B
Volume
22
Issue
1
Pub Type
Journals
Citation
Buh, G.
, Tran, C.
and Kopanski, J.
(2004),
PSPICE Analysis of a Scanning Capacitance Microscope Sensor, Journal of Vacuum Science and Technology B
(Accessed December 8, 2023)