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PSPICE Analysis of a Scanning Capacitance Microscope Sensor

Published

Author(s)

Gyoung H. Buh, Chi Tran, Joseph Kopanski
Citation
Journal of Vacuum Science and Technology B
Volume
22
Issue
1

Citation

Buh, G. , Tran, C. and Kopanski, J. (2004), PSPICE Analysis of a Scanning Capacitance Microscope Sensor, Journal of Vacuum Science and Technology B (Accessed April 25, 2024)
Created January 31, 2004, Updated October 12, 2021