@article{759196,
  author = {Gyoung Buh and Chi Tran and Joseph Kopanski},
  title = {PSPICE Analysis of a Scanning Capacitance Microscope Sensor},
  year = {2004},
  number = {22},
  month = {2004-02-01 00:02:00},
  publisher = {Journal of Vacuum Science and Technology B},
  language = {en},
}