TY  - JOUR
AU  - Buh, Gyoung
AU  - Tran, Chi
AU  - Kopanski, Joseph
C2  - Journal of Vacuum Science and Technology B
DA  - 2004-02-01 00:02:00
LA  - en
M1  - 22
PB  - Journal of Vacuum Science and Technology B
PY  - 2004
TI  - PSPICE Analysis of a Scanning Capacitance Microscope Sensor
ER  -