TY - JOUR AU - Gyoung Buh AU - Chi Tran AU - Joseph Kopanski C2 - Journal of Vacuum Science and Technology B DA - 2004-02-01 00:02:00 LA - en M1 - 22 PB - Journal of Vacuum Science and Technology B PY - 2004 TI - PSPICE Analysis of a Scanning Capacitance Microscope Sensor ER -