Dixson, R.
, Allen, R.
, Guthrie, W.
and Cresswell, M.
(2005),
Traceable Calibration of Critical-Dimension Atomic Force Microscope Linewidth Measurements with Nanometer Uncertainty, Journal of Vacuum Science and Technology B, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32210
(Accessed December 12, 2024)
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Traceable Calibration of Critical-Dimension Atomic Force Microscope Linewidth Measurements with Nanometer Uncertainty
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Journal of Vacuum Science and Technology B
Volume
23
Issue
6
Pub Type
Journals
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Created November 29, 2005, Updated October 12, 2021