November 1, 1999
Author(s)
R Koning, Ronald G. Dixson, Joseph Fu, Thomas Brian Renegar, Theodore V. Vorburger, V W. Tsai, Michael T. Postek
… the measurement of step heights on step height calibration standards. Both the bumps and the pits show much larger … SPIE, Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks, Fernando L. Podio, …