September 20, 2010
Author(s)
Liangchun (. Yu, Greg Dunne, Kevin Matocha, Kin P. Cheung, John S. Suehle, Kuang Sheng
… structure, however, it is widely believed that silicon oxide on SiC is physically limited, especially at high … experimental measurements of long-term reliability of oxide at high temperatures are necessary. In this work, … discussed and shown to be a possible indication that the oxide quality has not reached the intrinsic regime and …