August 1, 2003
Author(s)
S S. Churilov, Y N. Joshi, Joseph Reader
… The observed transitions were identified as belonging to ions from Xe 8+ to Xe 13+ . In the region of importance for … extreme ultraviolet, ions, microlithography, spectrum, wavelengths, xenon … High Resolution Spectrum of Xenon Ions at 13.4 nm …